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Official PDF TranslationSCIENCE CHINA Materials

Robust coating of indium selenide monolayer inks for wafer-scale, CMOS-compatible, high mobility thin film transistors

Authors: Wenhao Ran; Guozhen Shen

DOI: 10.1007/s40843-025-3304-7Status: Verified Translated Edition
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Key Findings in This Report

• • Average electron mobility of 90–120 cm² V⁻¹ s⁻¹ in solution-processed InSe TFTs matches state-of-the-art CVD-grown MoS₂, enabling cost-effective, high-performance back-end-of-line (BEOL) transistors for monolithic 3D integration. • • On/off current ratio up to 10⁷ and minimal hysteresis (<0.1 V) ensure low static power dissipation and reliable switching, critical for low-power logic and analog circuits in AI accelerators. • • Wafer-scale (4-inch) uniformity achieved via spin coating of InSe monolayer inks, with thickness controlled by ink concentration and coating cycles, providing a scalable path to high-volume manufacturing without high-temperature CVD or transfer steps. • • Excellent air stability and CMOS compatibility after thermal annealing (conversion from THAB/InSe superlattice to pure InSe) eliminate the need for encapsulation, reducing process complexity and cost for heterogeneous integration with silicon CMOS.